Healthcare Technology Featured Article

October 20, 2010

Healthcare Technology and News: French Microelectronics Research Institute to Work with FRT's MFE


CEA-LETI, an internationally leading research institution in the microelectronics, information and health technology industries, will be working with a fully automatic wafer inspection system, the MFE Metrology For Frontend (MFE) developed by Fries Research & Technology GmbH (FRT), a supplier of 3D surface metrology for research and production. This tool is a universal solution for the most diverse measuring tasks in wafer manufacturing and is used for the pioneering 3D IC connection technology.

As per SEMI standards, an MFE system will be installed for the high resolution characterization of raw, structured and bonded wafers. For 3D IC / TSV (Through Silicon Via) measurements, the tool incorporates a new technology for measuring particularly small TSV's with a very high aspect ratio (less than five microm in diameter and up to 180 microm deep). The FRT MFE system is based on the proven MicroProf multisensor technology, which can combine diverse measuring tasks into a single system. With the help of this system, CEA-LETI will determine parameters such as TTV (Total Thickness Variation), planarity, bow, warp, roughness, 3D topography, film thickness, as well as the ground-breaking TSV measurement capability.

FRT will display its multisensor metrology at SEMICON Europa between Oct. 19 and Oct. 21, (booth: 1.649). It is optimally prepared for the various measuring tasks within wafer metrology. Due to modularity construction and integration methods, FRT systems can be optimally equipped for future upgrades. Through the combination of several measuring procedures in a single universal tool, foot print requirements in the production fab can be reduced to a minimum. The tools achieve a very high degree of automation and optional wafer handling. MicroProf measuring systems are used by leading international manufacturers and research institutes in microelectronics and microsystems engineering as well as the photovoltaic, medical engineering, automotive and machine building industries.

CEA-LETI is part of the influential French research institute "Commissariat a l'Energie Atomique et aux Energies Alternatives" (CEA) located in Grenoble in the French Alps.


Sujata Garud is a HealthTechZone freelancer with three years of writing/editing experience and two years of market research experience. As an editor she has covered the IT, electronics, banking, pharma, construction, mining and healthcare industries. To see more of her articles, please visit her columnist page.

Edited by Jaclyn Allard

Get stories like this delivered straight to your inbox. [Free eNews Subscription]




SHARE THIS ARTICLE



FREE eNewsletter

Click here to receive your targeted Healthcare Technology Community eNewsletter.
[Subscribe Now]